Oxford Instruments

Oxford Instruments offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology.

These solutions are based on core technologies in:

-  Plasma Etch & Deposition
-  Atomic Layer Deposition (ALD)
-  Ion Beam Etch & Deposition
-  Nanoscale Growth Systems
-  Hydride Vapour Phase Epitaxy (HVPE)

Products range from compact stand-alone systems for R&D, through to batch tools and up to cassette-to-cassette and clustered platforms for production processing.

For more Information www.oxinst.com