STS

Surface Technology Systems plc is a manufacturer of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, XeF2 and PECVD sources.  These enabling technologies are used by a large number of worldwide manufacturers and researchers to fabricate a wide range of MEMS/MOEMS and nano-based devices. In particular, STS is the market-leading supplier of deep reactive ion etching (DRIE) equipment, and has offered the Advanced Silicon Etch (ASE®) process for DRIE of silicon for MEMS micromachining since 1994. 

Equipment Platforms
All STS' process technologies are available on a range of equipment platforms which give a logical upgrade path from R&D and pilot production to volume production, without the need for process re-qualification. Lifetime process support from a dedicated Process Engineering Team based in the UK headquarters is available to all customers, and comprehensive service and spares support is offered through a worldwide network of STS Service Centres and qualified agents.

STS

For more information: www.stsystems.com

Primaxx Inc

For more information: www.primaxxinc.com

XACTIX Inc

For more information: www.xactix.com