Focused Innovation. Solid Results
Tegal is an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronics.
We combine proven expertise with practical system strategies to deliver application-specific solutions that are robust and reliable, for applications such as:
Silicon DRIE MEMS Etch
PVD and Plasma Etch for AlN, PZT, and other Piezoelectric Films
Precision Descum
Stress-Controlled PVD for Metal Films on Thin Wafers
Tegal Contact:
Paul Werbaneth
Vice President - Marketing and Applications
